Heterogeneous integration of MEMS and photonic integrated circuits for chip-scale atomic spectrometers

Abstract

An integrated MEMS cell on a photonic integrated circuit is demonstrated which can achieve saturated absorption spectroscopy that resolves sub-Doppler hyperfine splittings in two rubidium isotopes with Lorenzian linewidths from 25 to 40 MHz.

Publication
2025 IEEE Photonics Society Summer Topicals Meeting Series (SUM)